體

規(guī)格

雜質含量（PPM）

執(zhí)行標準

氬

99.999-99.9996%

5N級N2≤2,H2≤1,總碳含量≤2，H2O≤4

GB/T10624-1995

氦

≥99%

Ne(H2),O2(Ar)≤5,N2,CH2總含量≤1%，H2O露點C-43

GB/T4844.1.1995

99.999-99.9996%

4N級Ne≤40,H2≤7,O2(Ar)≤5,N2≤25,Co≤1,CO2≤1,CH4≤1,H2O≤20

GB4844.2.1995

99.999-99.9996%

5N級Ne≤4,H2≤1,O2(Ar)≤1,N2≤2,Co≤0.5,CO2≤0.5,CH4≤0.5,H2O≤3

GB/T4844.3.1995

氖

99.99%

N2≤100,CO2≤1,CH4≤1

99.999%

N2≤3,He≤10,O2≤1,CO2≤0.5,CO≤1.0,CH4≤1,H2O≤3

氪

99.95%

Xe≤50,N2≤1.5,O2+Ar≤5,H2≤2,CO2≤1,CO≤1,CH4≤1,H2O≤3

99.99%

N2≤20,O2+Ar≤5,H2≤2,總碳≤3,H2O≤3,Xe≤50,總雜質含量≤100

GB/T5829-1995

99.995%

N2≤10,O2+Ar≤5,H2≤1,總碳≤2,H2O≤3,Xe≤30,總雜質含量≤50

GB/T5829-1995

99.999%

N2≤3,O2+Ar≤2,H2≤2,總碳≤1,H2O≤2.6,Xe≤4,總雜質含量≤10

GB/T5829-1995

氙

99.95%

CO2≤5,CO≤5,CH4≤5,N2O≤5,H2O≤5

99.99%

N2≤20,O2+Ar≤5,H2≤2,總碳≤3,H2O≤3,Kr≤50,N2O≤1,總雜質含量≤100

GB/T5829-1995

99.995%

N2≤10,O2+Ar≤4,H2≤1,總碳≤2,H2O≤3,Kr≤30,N2O≤1,總雜質含量≤50

GB/T5829-1995

99.999%

N2≤1,O2+Ar≤2,H2≤0.5,總碳≤1,H2O≤2.5,Kr≤4,N2O≤0.51,總雜質含量≤10

GB/T5829-1995